Msm component and associated gas panel assembly

ABSTRACT

A gas panel assembly having at least one U-shaped MSM interconnection component is disclosed where the interconnection component straddles at least a pair of adjacent modular inserts and is fastened to planar support plate such that the fluidic inserts are held immobile.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.11/827,621 filed on Jul. 12, 2007, the entire contents of which areincorporated herein by reference

FIELD OF THE INVENTION

My invention relates in general to gas handling systems forsemiconductor processing and in particular, to gas panel systems whetherof a localized nature or distributed around a semiconductor processingtool. In particular, the present invention relates to the field of fluidhandling devices, and specifically to a system and assembly for allowingprocess fluid flow into and out of modular surface mounted (“MSM”)fluidic components used in the semiconductor industry.

BACKGROUND

Wafer fabrication facilities are commonly organized to include areas inwhich chemical vapor deposition, plasma deposition, plasma etching,sputtering and the like are carried out. In order to carry out many ofthese processes, it is necessary that the tools which are used for theprocess, be they chemical vapor deposition reactors, vacuum sputteringmachines, plasma etchers or plasma enhanced chemical vapor deposition,be supplied with various process gases which gases may be reactive orinert or provide reactive species. It may be appreciated that in eachinstance pure carrier gases or reactant gases must be supplied to thetool in contaminant-free, precisely metered quantities.

In a typical wafer fabrication facility the inert and reactant gases arestored in tanks which may be located in the basement of the facility andwhich are connected via piping or conduit to a valve manifold box. Thetanks and the valve manifold box are considered to be part of thefacility level system. At the tool level an overall tool system, such asa plasma etcher or the like, includes a gas panel and the tool itself.The gas panel contained in the tool includes a plurality of gas pathshaving connected therein manual valves, pneumatic valves, pressureregulators, pressure transducers, mass flow controllers, filters,purifiers and the like. All have the purpose of delivering preciselymetered amounts of pure inert or reactant gas from the valve manifoldbox to the tool itself.

The gas panel is located in the cabinet with the tool and typicallyoccupies a relatively large amount of space, as each of the activedevices are plumbed into the gas panel, either through welding tubing tothe devices or combinations of welds and connectors such as VCRconnectors. Gas panels are relatively difficult to manufacture and henceexpensive. In a combination VCR connector and welded tubing system theindividual components are held on shimmed supports to provide alignmentprior to connections at VCR fittings. Misalignment at a VCR fitting canresult in leakage.

Additional problems with conventional gas panels relate to the fact thata combination VCR and welded system of the type currently used todaytypically requires a significant amount of space between each of thecomponents so that during servicing the VCR connections can be accessedand opened. In addition, in order to remove an active component from acontemporary gas panel, many of the supports of the surroundingcomponents must be loosened so that the components can be spread out toallow removal of the active component under consideration.

The advent of modular surface mount (“MSM”) fluidic components,beginning in the mid-nineteen nineties, is perceived as a significantmilestone in reducing the size of fluidic systems. That is, systemscomprised of fluid control and measurement components such as valves,regulators, filters, pressure transducers, mass flow meters, and massflow controllers. Prior to MSM interfaces, such components weretypically joined for fluid communication by interconnecting tubulationseither via welding or via reusable gasketed connections. Either methodwas enabled by metal tubing protrusions, or appendages, intrinsic toeach fluidic component for the express purposes of interconnection andfluid transport.

MSM interfaces did reduce the size, or “footprint,” of fluidic systemsconsiderably. In MSM architecture, the fluidic component is sealed,typically with elastomer O-rings or metal gaskets, using bolts forcompression, to a receptive MSM or “modular” architecture. Several MSMor modular architectures that are in common use are described in U.S.Pat. No. 5,836,355; U.S. Pat. No. 6,874,538; U.S. Pat. No. 6,951,226;U.S. Pat. No. 6,293,310 and U.S. Pat. No. 7,048,008. A common aspect ofthese disclosures is twofold: (1) to provide for the standardizedfluidic interface to seal to the MSM component and (2) to provideinterconnecting gas conduits for the purpose of routing fluids into, outof, and between fluidic components.

The reduction of size and internal “wetted” area and volume afforded bymodular fluidic systems are well understood, especially within thesemiconductor wafer processing industry wherein size, purity of fluids,cleanliness of the gas system, and serviceability are prized attributesof any fluidic system.

Although MSM-type fluidic systems offer advantages in terms of reducedsize, reduced area and volume exposed to the controlled fluids, andimproved serviceability, the MSM component typically must be sealed to areceptive modular architecture in the manner disclosed by theaforementioned patents. Put in another way, the MSM fluid component istypically mated to a corresponding modular interface in order tocomplete the fluidic circuit. Conventionally, this corresponding modularinterface is provided by modular architectures of various designs butall of which embody the standard modular interface as set forth by SEMIStandards F86-0304 and F87-0304, among others.

While there exist a number of ways to assemble gas panel systems, I havedevised a new approach that minimizes space requirements, substantiallyeliminates the number of parts needed and allows easy servicing of MSMcomponents. My invention addresses the various difficulties associatedwith the use of prior art gas panel assemblies by using MSM componentshaving U-shaped interconnections that interface and secure one or moremodular fluid inserts to a base or support plate. The U-shaped designhas alignment legs that straddle the modular fluid inserts in a pressingengagement against a planar support plate when the interconnection isfastened directly to a planar support surface. The fluid inserts have atleast one alignment connector on its bottom side that removably engagesalignment slots cut into the planar surface. These and other features ofmy invention are described below.

SUMMARY

My invention is directed to gas panel assemblies and in particular to anovel MSM interconnection component. The assemblies are characterized bythree main components; 1) a planar support plate, 2) at least a pair ofmodular fluid inserts, and 3) at least one U-shaped MSM interconnectioncomponent that straddles and is in fluid communication with the pair offluid inserts.

As the name suggests, this interconnection component is characterized byits U-shaped design that allows it to straddle the modular fluid insertsthat have been positioned on a planar support surface through acooperative interaction of alignment pins and slots, with the slotpreferably located on the planar support plate. The interconnectioncomponent has a base portion having a top surface, a bottom surface andat least two alignment legs. The alignment legs and bottom surfacedefine the U-shape opening that allows the component to straddle thefluid inserts. The top surface of the interconnection component cansupport a variety of MSM components that perform different processfunctions with respect the process fluid. Regardless of the particularMSM component used, the U-shaped interconnection component allows forfluid communication with the fluid inserts through the bottom surfacevia ports drilled in the base. The bottom surface is capable of forminga hermetic seal with the top surface of one or more fluid inserts. In atypical configuration, one port in one fluid insert is in sealingrelationship with one port on the bottom surface of the interconnectioncomponent and one port on a second adjacent fluid insert is in a sealingrelationship with a second port on the bottom surface of theinterconnection component. In this fashion fluid can travel from onefluid insert to an adjacent fluid insert via the interconnectioncomponent of the MSM component. In other words, the process fluid flowsfrom one modular fluid insert through one fluid passage way in the baseportion of the MSM interconnection component and back through a secondfluid passage way of the interconnection component and into a secondfluid insert.

The interconnection component has at least two fastener passages locatedin the at least two alignment legs. These fastener passages are alignedwith similar passages in the planar support surface. In this mannerfasteners are used to secure the MSM component directly to the planarsupport surface. The length of the alignment legs are chosen such thatthe bottom surface of the interconnection component exerts a downwardpressing force on the top surface of the fluid insert (or on a gasket orseal that is sandwiched there between). This downward force not onlycreates a leak proof seal between the fluid insert and theinterconnection component, but it also prevents the fluid insert frommoving in any direction. The inserts are also held in a non-movablerelationship with the planar support plate by a combination of thepressing force and the interaction of the alignment pins with the slots.

More particularly, the invention relates to a gas panel assemblycomprising a planar support plate having one or more alignment slots anda plurality of fastener passages; at least a pair of modular fluidinsert having top and bottom faces, with at least one alignment pinprotruding from the bottom faces that is configured to engage thealignment slot in the support plate, and where the insert has one ormore fluid passages in the top face. At least one U-shaped MSMinterconnection component having a base with top and bottom faces, wherethe top face is configured with an MSM component, the bottom face havingone or more fluid passages, and at least two alignment legs having atleast two fastener passages, where the one or more fluid passages in thebottom face is in fluid communication through the base with the MSMcomponent. The MSM interconnection component is configured to provide asealed interface between the one or more fluid passages in bottom faceof the MSM interconnection component and the one or more fluid passagesin the top face of the fluid insert; and where the fluid insert isnon-movably secured to the support plate when the U-shaped MSMinterconnection component is fastened to the support plate usingfasteners in the fastener passages.

One skilled in the use of MSM fluidic components will appreciate thatthe use a U-shaped MSM interconnection to fasten modular fluid insertsto a planar support, without the use of additional parts or fasteners,represents a significant and novel approach for the directimplementation of MSM fluidic components. The use of the U-shapedinterconnection components eliminates the need for separate carriagecomponents, which are separately fastened to a support and used tosupport the modular inserts, is more cost effective to implement, allowsfor easy replacement of the fluidic inserts for repairs or fluidic pathreconfiguration, and allows for mounting of the MSM fluidic componentsdirectly to the surface of the planar support for the most compactfluidic assembly possible. These and other embodiments are evident fromthe following more detailed description of my invention.

BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 is a perspective exploded view of an example embodiment of thegas panel assembly of the present invention.

FIG. 2 shows perspective views of two examples of possibleinterconnection components of the present invention.

FIG. 3 is a perspective view of examples of fluidic inserts modified toinclude lateral, or branching, tubulations.

FIG. 4 is a perspective view of one embodiment showing two or moretubulated fluidic inserts joined by welding to form a hermetic path forfluid communication between inserts.

DETAILED DESCRIPTION

My invention is useful with all process fluids known to those skilled inthe art, including gases and liquids typically used in the fabricationof electronic parts, including semiconductor wafers. The U-shapedinterconnector and modular fluid inserts of my invention are preferablymanufactured using metals that can transport corrosive process fluids.Such metals include those normally used for ultra-high purity chemicaland gas delivery, and for ultra-high vacuum environments, includingstainless steel of various alloys, Monel®, nickel, cobalt, titanium,Hastelloy®, and combinations thereof.

In particular, my invention relates to a substantially square orrectangular shaped U-shaped interconnector to provide direct connectionto the surface of a planar support plate. Those skilled in the art ofmetal fabrication may appreciate that both the U-shaped interconnectioncomponent and the modular fluid inserts may be fabricated by traditionalmachining methods from bulk material, or by powder metallurgy (PM)techniques of various forms such as metal injection molding (MIM), hotpowder forging, and hot or cold isostatic pressing, or by injectionmolding. Subsequent “clean-up” machining operations may be required toachieve acceptable surface finishes depending upon the fabricationmethod used. FIG. 1 shows an exploded view of one example of the gasassembly of our invention where planar support plate 1 contains slots 2for engaging pins 10 (not visible) located on the bottom surface themodular insert 4. Each insert has fluid passages 5 located in the topface that align and seal with fluid passages (not shown) on the bottomface of U-shaped MSM interconnection components 6. FIG. 2 illustratestwo possible designs for the interconnection component 6 having a base15 and top face 16 and bottom face 20. The MSM component 8 is attachedto or integral with top face 16. Bottom face 20 has fluid passages 21that align with fluid passages 5 in fluid inserts 4. Base 15 also has atleast two alignment legs 23 that extend downward to form the U-shapedconfiguration that allows the interconnection component 6 to straddlefluid inserts 4. Fastener passage ways 22 are positioned in thealignment legs to accept fasteners 7 that releasably engage fastenerpassages 3 on plate 1 such that the interconnection component straddlesinserts 4 and presses them to the surface of plate 1, thus preventingvertical and horizontal movement.

It may be further appreciated that, in practice, the present inventionis not limited to single linear assemblies. Modification of appropriatefluidic inserts to include lateral tubulations allows for an additionaldimension of construction within a monolithic structure. FIG. 3 shows arepresentative family of fluidic inserts that include lateraltubulations. These tubulations are in fluid communication with theinternal fluid passages of the inserts. Two or more tubulated insertsmay be hermetically joined by welding, typically automated orbitalwelding as is customary in the fabrication of fluid control systems, asmay be seen in FIG. 4. The addition of lateral tubulations to thefluidic inserts does not affect their depth. Thus the U-shaped design ofthe interconnection components accommodates both the linear andtransverse, or branching, configurations of the fluidic inserts, whichare of a constant depth and simply configured as appropriate. Thearrangement of inserts, of course, is driven by the desired fluidiccircuit and the corresponding selection and arrangement of components,such as valves, regulators, transducers, and filters, to accomplish thatcircuit. Thus very efficient spatial use of the monolithic structuresurface and complex fluidic circuits may be affected with the employmentof the U-shaped interconnection components when mounted to planarsupport plates as described herein.

Effecting fluid communication through the MSM interconnection componentsis accomplished by the modular fluid inserts 4. Importantly, the modularinserts of my invention are of a width and height that does not exceedthe dimensions of U-shaped space 11. Likewise, in configurations thathave manifolds that transverse the centerline of the fluid components,such as manifold 13 shown in FIG. 1, the U-shaped space 12 should beselected to easily straddle such manifolds. Modular inserts 4 are influid communication with MSM fluidic component 8 through a sealedrelationship due to the compressive force caused by the fasteners 7securing the interconnection components 6 to the top face of plate 1using appropriate gaskets and hermetic seals (not shown) that are wellknown in the art of gas panel assemblies. In order to detect whether aproper seal between the modular inserts and the interconnectioncomponent has been achieved, an optional leak check orifice 24 may beincluded on the interconnection component. This orifice can be a smallhole of passage way that is drilled through the base connecting thebottom face to the top face. If the seal is improper, process fluid willescape from the bottom face to the top face and can be easily detectedduring operation of the assembled gas panel. To ensure a proper seal, itis preferred that the diameters of all fluid passages in the fluidinserts are matched to those in the bottom face of the MSMinterconnection components to facilitate obtaining a leak proof seal,especially by the use of individual port seals or a seal plate wellknown to the art. Because no carriages or other structures are used tosupport the fluid inserts a compact assembly is possible. Likewise,because the U-shaped interconnection component is secured directly tothe support plate this eliminates the need for separate or additionalfasteners to secure carriages or other support components. The MSMfluidic components 8, for example, may be valves, regulators, pressuretransducers, filters, and any other fluidic components available withMSM-standard interfaces.

It will be clear that the present invention is well adapted to attainthe ends and advantages mentioned as well as those inherent therein.While a presently preferred embodiment has been described for purposesof this disclosure, various changes and modifications may be made whichare well within the scope of the present invention. Numerous otherchanges may be made which will readily suggest themselves to thoseskilled in the art and which are encompassed in the spirit of theinvention disclosed and as defined in the appended claims.

1-7. (canceled)
 8. A gas panel assembly comprising: a planar supportplate having one or more alignment slots arranged in two or more rows,with each row having a plurality of fastener passages; at least twoparallel rows of tow or more modular fluid inserts, where each inserthas top and bottom faces and at least one alignment protrusion in thebottom faces that is configured to engage the rows of alignment slots inthe support plate, where the inserts have one or more fluid passages inthe top faces; at least at least one tubulated insert positioned in arow and connected to another insert in a different row defining alateral passage between rows; and at least two U-shaped MSMinterconnection components each having a base with a top face containingan MSM component, a bottom face having one or more fluid passages, andat least two alignment legs, each having a fastener passage, where theone or more fluid passages in the bottom face is in fluid communicationthrough the base with the MSM component and where the bottom face of theMSM interconnection component is configured to provide a sealedinterface with the one or more fluid passages in the top faces of thefluid inserts; and where the fluid inserts in each row are non-movablysecured to the support plate through a compressive force when theU-shaped MSM interconnection components are fastened to the supportplate using fasteners in the fastener passages.
 9. The assembly of claim8 where the lateral passage extends from one row of inserts to anadjacent row at a 90 degree angle.
 10. The assembly of claim 8 where theinserts are fabricated from metals selected from the group consisting ofstainless steel of various alloys, Monel®, nickel, cobalt, titanium,Hastelloy®, and mixtures thereof.
 11. The assembly of claim 8 where thetubulated insert comprises two tubulated inserts, one in each row thatare welded together to form a hermetic seal.